Senior Research Engineer, Process Modules

Lithography process R&D in Advanced Process Modules, IME

Job Description:

• Actively working with cross functional stake owners to plan and develop new process.
• Validate design, reticle tap out and post tap out verification.
• Assist in internal and external technical discussion to overcome process related challenge and provide relevant solution.
• Perform process characterization, margin study to determine the process capability of new process platform.
• Act as a subject matter expert and resource for researchers and industry partners to enable process and/or product realization.
• Publish process development outcome and breakthrough in research community.
• Engage with relevant equipment makers/vendors and responsible for selecting and procuring research equipment.
• Work with fab team in establishing SPC for newly developed process.

Requirements

• Master/bachelor's degree in Materials Science, Electrical Engineering, Chemical Engineering, Physics, Chemistry, and Microelectronics, or closely related fields are welcome to apply.
• More than 2 years relevant working experiences in R&D and/or industry environment with broad exposure in handling 6", 8" and/or 12" substrate covering nano to micron tech nodes, preferably experiences in SiC/GaN/Photonics.
• Proficient in Photolithography tools including Immersion/KrF/I-line Scanner/Stepper/Mask Aligner, knowledge in EBEAM Lithography tool will be added advantage.
• Hand on experiences in metrology including but not limited to CDSEM, Overlay, OCD, DRSEM, Microscope. Capable to create recipe to support various research requirement.
• Knowledge in design and simulation (Prolith, OPC, etc), reticle layout (oas, gds) review and basic tap out process.
• Equip with Lithography skills set including fundamental Lithography theory, Photoresist characteristic and application, new process setup (swing curve, FEM, DOE, statistical root cause analysis and problem-solving methods, etc), optimization and margin improvement.
• Relevant hardware and application knowledge in Lithography tools and metrology.
• Possess good interpersonal and oral/written communication skills, with ability to deliver clear and concise messages to both internal and external stakeholders.